The Highest-end Tabletop SEM
| Performance | ||
| 5nm Resolution | 150,000x Magnification | SE/BSE Multi Detector |
Cost-effective Table-top SEM with Max. 150,000x of magnification by miniaturizing modules.
Able to scan images with high resolution of 5nm by installation of variable aperture with ease of use
SE (Secondary Electron)
▷ Create images with the height level information. Mostly used for surface inspection
BSE (Back Scattered Electron)
▷ Create images with material information (Elements)
| Convienience | ||
| Motorized Stage X,Y,Z,R,T (Fully motorized) | Auto Setting Focus, Contrast, Brightness | Navigation Mode Top View CCD Camera |
The only Table-top SEM of which has 5-axis, enables unlimited movement of stage
Easy and convenient image acquisition possible with “Click & Move” which is one of features of Motorized stage
Able to get images of variable angles via Tilting -45°~90°, and easily analyze EDS
| Specifications | |
| Electron System | |
| Resolution | Plus A: 5nm (30kV, SE Image) Plus B: 5nm(SE), 8nm(BSE) |
| Magnification | 20x~150,000x |
| Accelerating Voltage | 1~30kV (1/5/10/15/20/30) |
| Detector | Plus A : SE(Secondary Electron) Plus B : SE/BSE(back Scattered Electron) *Dual Detector |
| Electron Gun | Pre-centered Tungsten Filament Cartridge |
| Stage System | |
| Stage Traverse | X : 40mm, Y : 40mm, R : 360˚, Z : 0 to 40mm, T : -45 to 90˚ 5-axis Motorized |
| Max. Sample Size | 80mm in Diameter x 35mm in Height |
| Image System | |
| Automation Function | Auto Start, Auto Focus |
| Image Format | BMP, JPEG, PNG, TIFF |
| Vacuum System | |
| Vacuum Mode | Plus A : High Vacuum Plus B : High & Low Vacuum(Multi) |
| Vacuum Pump | Rotary Pump / Turbo Molecular Pump (Full Automation) |
| Dimensions | |
| Main Unit | 390(W)x380(D)x560(H)mm, 88kg |
| Controller Unit | 390(W)x325(D)x560(H)mm, 37kg |
| Rotary Pump | 400(W)x160(D)x340(H)mm, 24kg |
EDS System
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Ion Sputter Coater
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Applications
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