The Highest-end Tabletop SEM
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Performance | ||
5nm Resolution | 150,000x Magnification | SE/BSE Multi Detector |
Cost-effective Table-top SEM with Max. 150,000x of magnification by miniaturizing modules.
Able to scan images with high resolution of 5nm by installation of variable aperture with ease of use
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SE (Secondary Electron)
▷ Create images with the height level information. Mostly used for surface inspection
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BSE (Back Scattered Electron)
▷ Create images with material information (Elements)
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Convienience | ||
Motorized Stage X,Y,Z,R,T (Fully motorized) | Auto Setting Focus, Contrast, Brightness | Navigation Mode Top View CCD Camera |
The only Table-top SEM of which has 5-axis, enables unlimited movement of stage
Easy and convenient image acquisition possible with “Click & Move” which is one of features of Motorized stage
Able to get images of variable angles via Tilting -45°~90°, and easily analyze EDS
![](https://jint.jp/wp-content/uploads/2019/09/sec-5.jpg)
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Specifications | |
Electron System | |
Resolution | Plus A: 5nm (30kV, SE Image) Plus B: 5nm(SE), 8nm(BSE) |
Magnification | 20x~150,000x |
Accelerating Voltage | 1~30kV (1/5/10/15/20/30) |
Detector | Plus A : SE(Secondary Electron) Plus B : SE/BSE(back Scattered Electron) *Dual Detector |
Electron Gun | Pre-centered Tungsten Filament Cartridge |
Stage System | |
Stage Traverse | X : 40mm, Y : 40mm, R : 360˚, Z : 0 to 40mm, T : -45 to 90˚ 5-axis Motorized |
Max. Sample Size | 80mm in Diameter x 35mm in Height |
Image System | |
Automation Function | Auto Start, Auto Focus |
Image Format | BMP, JPEG, PNG, TIFF |
Vacuum System | |
Vacuum Mode | Plus A : High Vacuum Plus B : High & Low Vacuum(Multi) |
Vacuum Pump | Rotary Pump / Turbo Molecular Pump (Full Automation) |
Dimensions | |
Main Unit | 390(W)x380(D)x560(H)mm, 88kg |
Controller Unit | 390(W)x325(D)x560(H)mm, 37kg |
Rotary Pump | 400(W)x160(D)x340(H)mm, 24kg |
EDS System
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Ion Sputter Coater
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Applications
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